Driving device of a vibration type actuator

ABSTRACT

An object of the present invention is to improve electro-mechanical energy conversion efficiency and reduce generation of noises in a vibration type actuator. To achieve the above object of the present invention, each of plural switching elements is operated by a switching pulse generated by a drive control circuit of the motor. As a result, the drive control circuit selects a width of the generated switching pulse such that the amplitude of a base wave frequency component (“base wave”) among frequency components of a voltage applied to an inductance element may be larger than a total amplitude of higher harmonic wave frequency components (“whole higher harmonic wave”).

BACKGROUND OF THE INVENTION

[0001] 1. Field of the Invention

[0002] The present invention relates to a driving device of a vibration type actuator, and more particularly, to a driving device of a vibration type actuator for exciting and vibrating an electro-mechanical energy conversion element by applying a periodic signal to the element and obtaining a driving force.

[0003] 2. Related Background Art

[0004] There is a vibration type actuator constructed by plural piezoelectric elements having polarities inverted to each other and a vibration member adhered to these piezoelectric elements as one form of the vibration type actuator. Alternating signals of two phases having a phase difference of 90 degrees to each other are applied to each of the piezoelectric elements. Thus, a travelling wave is generated on the vibration member. When a moving member is brought into press contact with the vibration member, the moving member can obtain a driving force by a frictional force.

[0005] In comparison with an actuator using an electromagnetic force, the vibration type actuator has such a characteristic that driving torque at low speed is larger and responsibility is better and it is quiet enough the human to be unaware of a driving sound since vibration in a frequency area equal to or greater than an audible area is utilized. Since the vibration type actuator has such features, the vibration type actuator is used in e.g., a driving section of an image printer.

[0006] The vibration type actuator generally requires a large alternating voltage. As a method for obtaining the large alternating voltage, there are a method for amplifying a driving signal by a linear amplifier, a method for rising a voltage by a transformer, a method utilizing resonance with a capacity component of the vibration type actuator by combining an inductance element and a switching element with each other, etc. The voltage rises by one of these methods, or combining plural methods with each other.

[0007] The method for rising the voltage by a transformer and the method for switching and rising the voltage by combining the inductance element and the switching element with each other are preferably used among the above methods since these two methods are excellent in view of efficiency, cost, space, and the like.

[0008] However, higher harmonic waves of the driving signal are always included in a driving signal in the voltage rising system using switching. These higher harmonic waves do not contribute to driving. Instead, there are fears that these higher harmonic waves become useless loss and cause heating of the actuator and undesirable vibration and become a noise source. In the switching system, a waveform is generally smoothed by matching of the inductance element and the capacity component of the vibration type actuator, but a larger higher harmonic wave component causes useless heating of the inductance element.

[0009] For example, a method for making a driving pulse based on a pulse having a frequency four times a driving frequency as shown in Japanese Patent Application Laid-Open Nos. 63-1379 and 63-262070 is known as the voltage rising system using switching. In this method, duty of the pulse is limited to 25% or 50% and no driving operation having preferable energy conversion efficiency can be performed since there are many higher harmonic wave components.

[0010] There is also a method for modulating a pulse width as shown in Japanese Patent Application Laid-Open No. 4-140075. In this method, efficiency is not necessarily good and no driving operation for reducing generation of noises can be necessarily performed.

SUMMARY OF THE INVENTION

[0011] The present invention has been made in view of the foregoing problems, and therefore has an object thereof to provide a driving device of a vibration type actuator for improving electro-mechanical energy conversion efficiency and reducing generation of noises.

[0012] One aspect of the application resides in a driving device of a vibration type actuator for obtaining a driving force by exciting an electro-mechanical energy conversion element by applying a periodic signal to the electro-mechanical energy conversion element, comprising a D.C. power source; plural switching elements connected to the D.C. power source; an inductance element for voltage rise connected to the plural switching elements; and a drive control circuit for generating a switching pulse for operating the plural switching elements, wherein each of the plural switching elements is operated by the switching pulse generated by the drive control circuit, and the drive control circuit selects a width of the generated switching pulse so as to set the amplitude of a base wave frequency component among frequency components of a voltage applied to the inductance element to be larger than a total amplitude of higher harmonic wave frequency components.

[0013] One aspect of the application also resides in a driving device of a vibration type actuator for obtaining a driving force by exciting an electro-mechanical energy conversion element by applying a periodic signal to the electro-mechanical energy conversion element, comprising a D.C. power source; plural switching elements connected to the D.C. power source; an inductance element for voltage rise connected to the plural switching elements; and a drive control circuit for generating a switching pulse for operating the plural switching elements; wherein each of the plural switching elements is operated by the switching pulse generated by the drive control circuit, and the drive control circuit selects a width of the generated switching pulse so as to set an amplitude ratio of a base frequency component to a total amplitude of higher harmonic wave frequency components of a voltage applied to the inductance element to be approximately maximum.

[0014] One aspect of the application also resides in a driving device of a vibration type actuator for obtaining a driving force by exciting an electro-mechanical energy conversion element by applying a periodic signal to the electro-mechanical energy conversion element, comprising a D.C. power source; plural switching elements connected to the D.C. power source; an inductance element for voltage rise connected to the plural switching elements; and a drive control circuit for generating a switching pulse for operating the plural switching elements; wherein the drive control circuit gradually increases a width of the generated switching pulse from zero at a rising time and operates the plural switching elements by the switching pulse so that the drive control circuit sweeps the pulse width until an amplitude ratio of a base wave frequency component to a total amplitude of higher harmonic wave frequency components of a voltage applied to the inductance element is approximately maximum; and the drive control circuit fixes the pulse width in this state.

[0015] One aspect of the application also resides in a driving device of a vibration type actuator for obtaining a driving force by exciting an electro-mechanical energy conversion element by applying a periodic signal to the electro-mechanical energy conversion element, comprising a D.C. power source; plural switching elements connected to the D.C. power source; and a drive control circuit for generating a switching pulse for operating the plural switching elements, wherein each of the plural switching elements is operated by the switching pulse generated by the drive control circuit, and the drive control circuit selects a width of the generated switching pulse so as to set the amplitude of a base wave frequency component among frequency components of a voltage applied to the electro-mechanical energy conversion element to be larger than a total amplitude of higher harmonic wave frequency components.

[0016] One aspect of the application also resides in a driving device of a vibration type actuator for obtaining a driving force by exciting an electro-mechanical energy conversion element by applying a periodic signal to the electro-mechanical energy conversion element, comprising a D.C. power source; plural switching elements connected to the D.C. power source; and a drive control circuit for generating a switching pulse for operating the plural switching elements, wherein each of the plural switching elements is operated by the switching pulse generated by the drive control circuit, and the drive control circuit selects a width of the generated switching pulse so as to set an amplitude ratio of a base frequency component to a total amplitude of higher harmonic wave frequency components of a voltage applied to the electro-mechanical energy conversion element to be approximately maximum.

[0017] One aspect of the application also resides in a driving device of a vibration type actuator for obtaining a driving force by exciting an electro-mechanical energy conversion element by applying a periodic signal to the electro-mechanical energy conversion element, comprising a D.C. power source; plural switching elements connected to the D.C. power source; and a drive control circuit for generating a switching pulse for operating the plural switching elements, wherein the drive control circuit gradually increases a width of the generated switching pulse from zero at a rising time and operates the plural switching elements by the switching pulse so that the drive control circuit sweeps the pulse width until an amplitude ratio of a base wave frequency component to a total amplitude of higher harmonic wave frequency components of a voltage applied to the electro-mechanical energy conversion element is approximately maximum; and the drive control circuit fixes the pulse width in this state.

[0018] One aspect of the application further resides in a driving device of a vibration type actuator for obtaining a driving force by applying a periodic signal to an electro-mechanical energy conversion element portion arranged in a vibration member, comprising a switching element switched in response to a pulse signal; an inductance element through which an electric current intermittently flows by switching the switching element; and setting means for applying a voltage generated by intermittently flowing the electric current through the inductance element to the electro-mechanical energy conversion element portion, and setting a duty of the pulse signal to a duty in which a base frequency component among frequency components of a voltage applied to the inductance element is larger than a higher harmonic wave component.

BRIEF DESCRIPTION OF THE DRAWINGS

[0019]FIG. 1 is a cross-sectional view showing the construction of a vibration type actuator operated by a driving device in accordance with a first embodiment of the present invention;

[0020]FIG. 2 is a circuit diagram showing the driving device in accordance with the first embodiment for making an alternating signal applied to a piezoelectric element;

[0021]FIG. 3 is a block diagram showing the internal construction of a drive control circuit;

[0022]FIG. 4 is a graph showing driving frequency-rotational speed characteristics in the vibration type actuator;

[0023]FIG. 5 is a timing chart showing a driving signal generated by a multiplexer and delay circuit;

[0024]FIG. 6 is a view showing a time change of a voltage applied to both ends of the primary side of a transformer;

[0025]FIG. 7 is a view showing the relation of magnitudes of a base wave and a higher harmonic wave with respect to duty of the driving signal and showing a higher harmonic wave ratio;

[0026]FIG. 8 is a block diagram showing a speed controller of the vibration type actuator;

[0027]FIG. 9 is a view showing a driving circuit constructed such that a transformer is omitted;

[0028]FIG. 10 is a block diagram showing a speed controller of a vibration type actuator in accordance with a second embodiment;

[0029]FIG. 11 is a block diagram showing the internal construction of a pulse synthesizing circuit;

[0030]FIG. 12 is a block diagram showing the internal construction of a three over eight calculation circuit;

[0031]FIG. 13 is a timing chart showing input and output signals of an output circuit;

[0032]FIG. 14 is a block diagram showing the construction of a delay time generating circuit; and

[0033]FIG. 15 is a timing chart showing a signal mode of each portion of the delay time generating circuit shown in FIG. 14.

DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0034] The embodiments of the present invention will next be explained with reference to the drawings.

FIRST EMBODIMENT

[0035]FIG. 1 is a cross-sectional view showing the construction of a vibration type actuator operated by a driving device in accordance with a first embodiment of the present invention. Here, the vibration type actuator of an annulus ring shape is shown as one example.

[0036] In FIG. 1, reference numerals 1, 2, 3 and 4 respectively designate a rotor, a pressurizing spring, a stator (vibration member) and a piezoelectric element serving as an electro-mechanical energy conversion element. Plural piezoelectric elements 4 of different polarities are adhered to the stator (vibration member) 3 and alternating signals of two phases having a phase difference of 90 degrees to each other are applied to the piezoelectric elements 4. Thus, a travelling wave is generated on a surface of the stator (vibration member) 3 and the rotor 1 is brought into press contact with the stator (vibration member) 3 by the pressurizing spring 2 so that the rotor 1 obtains a driving force. A frictional member having a predetermined frictional coefficient different from that of a base material is arranged in each of contact portions of the stator (vibration member) 3 and the rotor 1.

[0037]FIG. 2 is a circuit diagram showing the driving device in accordance with the first embodiment for making the alternating signals applied to the piezoelectric elements 4.

[0038] A driving voltage of several hundred V is required to operate the vibration type actuator shown in FIG. 1. Therefore, as shown in FIG. 2, a full bridge circuit is connected to each of the primary sides of transformers 14, 15. Namely, the full bridge circuit constructed by switching elements 6 to 9 is connected to the primary side of the transformer 14. Similarly, the full bridge circuit constructed by switching elements 10 to 13 is connected to the primary side of the transformer 15. Each of the switching elements 6 to 13 is constructed by a MOSFET. Piezoelectric elements 16, 17 are respectively connected to secondary sides of the transformers 14, 15. Each of the full bridge circuits switches a power voltage from a D.C. power source 5 and supplies a high voltage to both ends of each of the piezoelectric elements 16, 17 by rising the power voltage by each of the transformers.

[0039] Each of driving pulses p1 to p8 is transmitted from a drive control circuit 18 to each of gates of the switching elements 6 to 13 each constructed by a MOSFET.

[0040]FIG. 3 is a block diagram showing an internal construction of the drive control circuit 18.

[0041] In FIG. 3, an eight times frequency oscillator 19 generates a periodic signal of a frequency eight times a driving frequency in accordance with a speed command (frequency command) sent from the exterior as a target rotational speed of the vibration type actuator. In the vibration type actuator, a relation shown in FIG. 4 exists between the rotational speed of the vibration type actuator and the frequency of a driving alternating voltage sent to the vibration type actuator. Accordingly, the rotational speed of the vibration type actuator can be controlled by adjusting the frequency of the driving alternating voltage. Here, a frequency corresponding to such a target rotational speed is sent to the drive control circuit 18 and the eight times frequency oscillator 19 generates a pulse having a frequency eight times the sent frequency.

[0042] A three bit counter 20 and a multiplexer and delay circuit 21 generate driving pulses p1 to p8 based on an output pulse of the eight times frequency oscillator 19. Namely, the three bit counter 20 counts the number of inputted pulses and outputs three bit counting values b0 to b2. However, the three bit counter 20 is set to a cyclic counter. Accordingly, when a counting value reaches “111”, the counting value is next returned to “000”. The multiplexer and delay circuit 21 generates driving pulses p1 to p8 based on such output counting values b0 to b2 of the three bit counter 20.

[0043]FIG. 5 is a timing chart showing the driving pulses p1 to p8 generated by the multiplexer and delay circuit 21. Namely, a high voltage level of the driving pulse p1 is generated between counting values “000” and “010”. A high voltage level of the driving pulse p2 is generated between counting values “100” and “110”. A high voltage level of the driving pulse p3 is generated between counting values “011” and “111”. A high voltage level of the driving pulse p4 is generated between counting values “000” and “011”. A delay time is set to prevent that switching elements (switching elements 6 and 8, or switching elements 7 and 9) in a series connection relation of the full bridge circuit are simultaneously turned on and a through electric current flows through these switching elements. The delay time is set in rising of each driving signal such that, until a predetermined delay time has passed after turning-off of one switching element, the other switching element is not turned on.

[0044] Similarly, a high voltage level of the driving pulse p5 is generated between counting values “010” and “100”. A high voltage level of the driving pulse p6 is generated between counting values “110” and “000”. A high voltage level of the driving pulse p7 is generated between counting values “101” and “001”. A high voltage level of the driving pulse p8 is generated between counting values “001” and “101”. A delay time is similarly set in rising of each of the driving pulses p5 to p8.

[0045] As can be seen from the above explanation, driving pulses p1, p2, p5 and p6 for respectively operating switching elements 6, 7, 10 and 11 on a high voltage side of the full bridge circuit are set such that a turning-on time (high voltage level time) of each of these driving pulses is equal to ⅜ times a driving period (here, the description is made by neglecting the delay time for convenience of the explanation). The reasons for this are explained as follows.

[0046] When a period is set to T and the turning-on time is set to PW in each of the driving pulses p1, p2, p5 and p6, a time change in voltage applied to both ends of the primary side of each of the transformers 14, 15 at an operating time is provided as shown in FIG. 6. Reference numeral Vd shows a voltage value of the D.C. power source 5.

[0047] Here, when a waveform of FIG. 6 is Fourier-expanded, the following formula (1) is obtained. $\begin{matrix} {{F(t)} = {\frac{4}{\pi} \cdot {Vd} \cdot {\sum\limits_{n = 1}^{\infty}{{\frac{1}{n} \cdot \sin}{\frac{n\quad \pi \quad {PW}}{T} \cdot \sin}{\frac{n\quad \pi}{2} \cdot \sin}\frac{2n\quad \pi}{T}t}}}} & (1) \end{matrix}$

[0048] Accordingly, coefficients at respective orders are expressed by the following formula (2). $\begin{matrix} \left\{ \begin{matrix} {{{a_{n}({odd})} = {{\frac{4}{\pi} \cdot {Vd} \cdot \frac{1}{n} \cdot \sin}\frac{n\quad \quad {PW}}{T}}}\quad} & \left( {{odd}\quad {order}} \right) \\ {{a_{n}({even})} = 0} & \left( {{even}\quad {order}} \right) \end{matrix} \right. & (2) \end{matrix}$

[0049] Magnitudes of such coefficients at the respective orders are provided as shown in FIG. 7 when the duty of a driving signal, i.e., PW/T (%) is changed.

[0050]FIG. 7 is a view showing the relation of magnitudes of a base wave and a higher harmonic wave with respect to duty of the driving signal and showing a higher harmonic wave ratio. In FIG. 7, “3rd” shows a third order higher harmonic wave and “5th” shows a fifth order higher harmonic wave. In FIG. 7, higher harmonic waves are normalized by coefficient (4/π)Vd. The magnitude of a “whole higher harmonic wave” is obtained by calculating the square root of a square sum of all the normalized higher harmonic waves. The higher harmonic wave ratio is a ratio of the magnitude of the “whole higher harmonic wave” to the magnitude of the “base wave”.

[0051] As can be seen from FIG. 7, a base wave component becomes maximum when the duty is 50%. However, when the duty is 50%, a higher harmonic wave component is also large and becomes thermal energy so that no efficient driving operation can be necessarily performed. In contrast to this, when the duty is equal to or smaller than about 13%, the higher harmonic wave component is larger than the base wave so that efficiency is reduced.

[0052] A duty providing a larger base wave component and a smaller higher harmonic wave component is a duty having a smallest higher harmonic wave ratio. This duty approximately lies in a range of ±10% with about 37.5% as a center. The electro-mechanical energy conversion efficiency is best when the driving operation is performed in this duty.

[0053] In this embodiment, as described before, the piezoelectric elements are operated in a duty of ⅜=37.5% of a driving period at any time. Accordingly, the driving operation of more preferable energy conversion efficiency can be performed in comparison with a case in which the driving operation is performed in conventional duties of 25% and 50% or a case in which a pulse duty is changed. Further, since the higher harmonic wave component is small upon providing the same output, the generation of noises is small in comparison with a conventional example.

[0054]FIG. 8 is a block diagram showing a speed controller of the vibration type actuator.

[0055] A speed sensor 26 such as a rotary encoder, etc. arranged in the actuator 25 detects a rotational speed of the actuator 25 and a speed detecting signal is sent to a speed control circuit 27. The speed control circuit 27 outputs a frequency corresponding to a target rotational speed of the actuator 25 to an oscillating circuit 22 as a command value. The oscillating circuit 22 receiving the command generates a pulse of one phase having a frequency eight times the frequency corresponding to the target rotational speed, and outputs the pulse to a pulse synthesizing circuit 23. The pulse synthesizing circuit 23 synthesizes an eight-phase pulse having a duty of ⅜=37.5% based on the eight times frequency pulse. A switching element of a driver 24 is turned on and off by the synthesized pulse and a voltage sufficient to operate the actuator 25 is outputted from the secondary side of a transformer.

[0056] The vibration type actuator has the relation as shown in FIG. 4 between a driving frequency and the rotational speed. Therefore, it is possible to perform speed control with high accuracy for converging the rotational speed to the target rotational speed by finely feedback-controlling the frequency.

[0057] A rotational direction of the vibration type actuator can be set to be reverse by sending a driving direction command from the exterior to the pulse synthesizing circuit 23 and setting the phase relation of driving pulses p1 to p4 and driving pulses p5 to p8 to be reverse (changing the phase relation from delay to advance, or from advance to delay).

[0058] In the above first embodiment, the piezoelectric elements are operated in the duty of ⅜=37.5% of the driving period at any time. However, instead of this, the drive control circuit may select the width of a generated switching pulse such that the amplitude of a base wave frequency component among frequency components of a voltage applied to the primary side of a transformer may be larger than a total amplitude of higher harmonic wave frequency components although energy conversion efficiency is slightly reduced.

[0059] A driving circuit of two phases having a phase difference of 90 degrees is explained in FIGS. 2 and 5. However, a vibration type actuator of only one driving phase can be similarly operated by using driving pulses p1 to p4 or driving pulses p5 to p8.

[0060] When the voltage of a D.C. power source is sufficiently high or the driving voltage of the vibration type actuator is low, similar effects can be also obtained even in a driving circuit shown in FIG. 9. FIG. 9 is a view showing the driving circuit constructed such that the transformer is omitted. In FIG. 9, reference numerals 58, 59 designate piezoelectric elements and reference numerals 49 to 52 and 54 to 57 designate switching elements. Reference numerals 48 and 53 respectively designate a D.C. power source and a drive control circuit.

[0061] Instead of the above first embodiment, the drive control circuit gradually increases the width of a switching pulse from zero at a rising time. Each of the switching elements is operated by the switching pulse. As a result, the pulse width is swept until an amplitude ratio of a base wave frequency component to a total amplitude of higher harmonic wave frequency components of a voltage applied to a transformer becomes approximately maximum. A stationary switching operation may be also performed by the pulse by fixing the pulse width in this state.

SECOND EMBODIMENT

[0062]FIG. 10 is a block diagram showing a speed controller of a vibration type actuator in accordance with a second embodiment.

[0063] In the second embodiment, a speed sensor 32 such as a rotary encoder, etc. arranged in the actuator 31 detects a rotational speed of the actuator 31 and a speed detecting signal is sent to a speed control circuit 33. The speed control circuit 33 outputs a frequency corresponding to a target rotational speed of the actuator 31 to a pulse synthesizing circuit 29 as a command value. An oscillating circuit 28 is constructed by a crystal, etc. and outputs a pulse of a sufficiently high specific frequency about 1000 times a driving frequency of the actuator 31. The pulse synthesizing circuit 29 receives the command of the speed control circuit 33 and synthesizes a driving pulse having a duty of 37.5% by a required number of pulses on the basis of an output pulse of the oscillating circuit 28.

[0064]FIG. 11 is a block diagram showing an internal construction of the pulse synthesizing circuit 29.

[0065] In FIG. 11, a frequency command sent from the speed control circuit 33 is inputted to a four phase dispersing circuit 38 and a three over eight calculation circuit 36. The four phase dispersing circuit 38 divides a period of the commanded frequency into four divisional periods and calculates the number of pulses of the oscillating circuit 28 to be generated within the obtained divisional periods and sends the pulse number to a frequency counter 34. The frequency counter 34 loads the sent pulse number and counts down by an output pulse from the oscillating circuit 28. Thus, the frequency counter 34 outputs a pulse (a) of one shot having a frequency about four times the command frequency to an output circuit 35.

[0066] The three over eight calculation circuit 36 makes a pulse width command according to the frequency command and outputs the pulse width command to a pulse width counter 37. For example, when a command value of the frequency is given by binary digital data, the three over eight calculation circuit 36 is constructed by a digital circuit shown in FIG. 12. Namely, in the three over eight calculation circuit 36, right shifters 39 to 41 shift the frequency data rightwards by three bits. An adder 43 adds a value obtained by these shifters and a value obtained by shifting the obtained value leftwards by one bit by a left shifter 42. Thus, a frequency value ⅜ times the command frequency value is obtained. The frequency value is sent to the pulse width counter 37 as a pulse width command. “0” is set to a bit which becomes empty by the shifting operation. A bit overflown by the right shift is rounded down.

[0067] When the frequency counter 34 outputs a pulse of one shot, the pulse width command from the three over eight calculation circuit 36 is loaded to the pulse width counter 37. The pulse width counter 37 obtains a period from a frequency of the sent pulse width command, calculates the number of pulses of the oscillating circuit 28 to be generated within the period, loads the pulse number, and counts down by an output pulse from the oscillating circuit 28. Thus, a pulse (b) of one shot is outputted from the pulse width counter 37 in timing corresponding to a pulse width of duty 37.5% (=⅜). When the duty is equal to or greater than 25%, turning-on periods of the pulse overlap each other in four phases. Therefore, two pulse width counters are used for the pulse width counter 37 and are alternately operated (are expressed by “x2” in FIG. 11).

[0068]FIG. 13 is a timing chart showing input and output signals of the output circuit 35. In the second embodiment, the same driving pulses p1 to p8 as the driving pulses p1 to p8 in the first embodiment shown in FIG. 2 are also set to be used.

[0069] Driving pulses p1, p2, p5 and p6 rise at an edge of an output pulse (a) of the frequency counter 34 and fall at an edge of an output pulse (b1, b2) of the pulse width counter 37. Driving pulses p3, p4, p6 and p7 can be respectively synthesized by inverting the driving pulses p1, p2, p5 and p6 and arranging dead times before and after these driving pulses p1, p2, p5 and p6 although the construction is not shown. The dead times are set to prevent that switching elements in a series connection relation of a full bridge circuit are simultaneously turned on and a through electric current flows through the switching elements. The dead times are set such that, after one switching element is turned off and the other switching element is turned on until a predetermined time has passed. The dead times may be set by a method shown in FIGS. 14 and 15, and may be also set by arranging a delay counter and measuring a suitable delay time by an output pulse of the oscillating circuit 28.

[0070]FIG. 14 shows a delay time generating circuit in which reference numerals 44, 45, 46 and 47 respectively designate a buffer, a resistor, a capacitor and an exclusive OR circuit. FIG. 15 is a timing chart showing signal forms of respective portions of the delay time generating circuit shown in FIG. 14. A pulse (c) having a predetermined delay time determined in accordance with values of the resistor 45 and the capacitor 46 can be obtained as an output of the exclusive OR circuit 47.

[0071] In the above embodiment, a frequency four times the target frequency is obtained by the four phase dispersing circuit 38 and the frequency counter 34. However, instead of this, the frequency four times the target frequency may be also obtained by dividing an output frequency of the oscillating circuit 28 by a frequency divider.

[0072] The phase relation of driving pulses p1 to p4 and driving pulses p5 to p8 can be set to be reverse by a driving direction command inputted to the output circuit 35 of FIG. 11 so that a rotational driving direction of the vibration type actuator can be set to be reverse.

[0073] According to the second embodiment, similar to the first embodiment, the vibration type actuator of one driving phase can be also operated.

[0074] Further, similar to the first embodiment, the second embodiment can be constructed by omitting an inductance element as shown in FIG. 9 when the voltage of a D.C. power source is sufficiently high, or a driving voltage of the vibration type actuator is low. 

What is claimed is:
 1. A driving device of a vibration type actuator for obtaining a driving force by exciting an electro-mechanical energy conversion element by applying a periodic signal to the electro-mechanical energy conversion element, comprising: a D.C. power source; plural switching elements connected to said D.C. power source; an inductance element for voltage rise connected to said plural switching elements; and a drive control circuit which generates a switching pulse for operating said plural switching elements, wherein each of said plural switching elements is operated by the switching pulse generated by said drive control circuit, and said drive control circuit selects a width of the generated switching pulse so as to set the amplitude of a base wave frequency component among frequency components of a voltage applied to said inductance element to be larger than a total amplitude of higher harmonic wave frequency components.
 2. A driving device of a vibration type actuator according to claim 1, wherein said plural switching elements includes: first and second switching elements each having one end connected to said D.C. power source and the other end connected to both ends of a first inductance element; third and fourth switching elements each having one end connected to the ground and the other end connected to both ends of said first inductance element; fifth and sixth switching elements each having one end connected to said D.C. power source and the other end connected to both ends of a second inductance element; and seventh and eighth switching elements each having one end connected to the ground and the other end connected to both ends of said second inductance element.
 3. A driving device of a vibration type actuator according to claim 2, wherein switching pulses given from said drive control circuit to said first and second switching elements have a phase difference of 180 degrees to each other and are set in a range of ±10% with an on-duty of 37.5% as a center at a stationary time; and switching pulses given from said drive control circuit to said third and fourth switching elements respectively have shapes obtained by inverting the switching pulses given to said first and second switching elements, and are set to have pulse widths each having a suitable delay time for preventing a through electric current from flowing through the switching elements in a series connection relation.
 4. A driving device of a vibration type actuator according to claim 3, wherein said drive control circuit includes: eight times pulse generating means which generates a pulse having a frequency eight times a target driving frequency; first pulse generating means which generates a pulse for setting a period during which eight pulses are generated to one period and setting a period during which three pulses are generated to a turning-on period on the basis of the pulse generated by said eight times pulse generating means, and sends the set pulse to said first switching element; and second pulse generating means which generates a pulse delayed by four pulses generated by said eight times pulse generating means from the pulse generated by said first pulse generating means, and sends the delayed pulse to said second switching element.
 5. A driving device of a vibration type actuator according to claim 4, wherein said drive control circuit further includes: third pulse generating means which generates a pulse delayed by two pulses generated by said eight times pulse generating means from the pulse generated by said first pulse generating means, and sends the delayed pulse to said fifth switching element; and fourth pulse generating means which generates a pulse delayed by two pulses generated by said eight times pulse generating means from the pulse generated by said second pulse generating means, and sends the delayed pulse to said sixth switching element.
 6. A driving device of a vibration type actuator according to claim 1, wherein said drive control circuit includes: an oscillator which oscillates a reference frequency sufficiently higher than a driving frequency of the electro-mechanical energy conversion element; and synthesizing means which synthesizes a target pulse width of the switching pulse by dividing the reference frequency oscillated by said oscillator.
 7. A driving device of a vibration type actuator according to claim 1, wherein said drive control circuit includes: a pulse generator which generates a pulse of a reference frequency sufficiently higher than a driving frequency of the electro-mechanical energy conversion element; and synthesizing means which synthesizes a target pulse width of the switching pulse by counting the number of pulses generated by said pulse generator.
 8. A driving device of a vibration type actuator according to claim 1, wherein said inductance element is constructed by a transformer for rising a voltage for operating the vibration type actuator and having a primary side connected to said plural switching elements and a secondary side connected to the electro-mechanical energy conversion element.
 9. A driving device of a vibration type actuator for obtaining a driving force by exciting an electro-mechanical energy conversion element by applying a periodic signal to the electro-mechanical energy conversion element, and comprising: a D.C. power source; plural switching elements connected to said D.C. power source; an inductance element for voltage rise connected to said plural switching elements; and a drive control circuit which generates a switching pulse for operating said plural switching elements, wherein each of said plural switching elements is operated by the switching pulse generated by said drive control circuit, and said drive control circuit selects a width of the generated switching pulse so as to set an amplitude ratio of a base frequency component to a total amplitude of higher harmonic wave frequency components of a voltage applied to said inductance element to be approximately maximum.
 10. A driving device of a vibration type actuator according to claim 9, wherein said plural switching elements includes: first and second switching elements each having one end connected to said D.C. power source and the other end connected to both ends of a first inductance element; third and fourth switching elements each having one end connected to the ground and the other end connected to both ends of said first inductance element; fifth and sixth switching elements each having one end connected to said D.C. power source and the other end connected to both ends of a second inductance element; and seventh and eighth switching elements each having one end connected to the ground and the other end connected to both ends of said second inductance element.
 11. A driving device of a vibration type actuator according to claim 10, wherein switching pulses given from said drive control circuit to said first and second switching elements have a phase difference of 180 degrees to each other and are set in a range of ±10% with an on-duty of 37.5% as a center at a stationary time; and switching pulses given from said drive control circuit to said third and fourth switching elements respectively have shapes obtained by inverting the switching pulses given to said first and second switching elements, and are set to have pulse widths each having a suitable delay time for preventing a through electric current from flowing through the switching elements in a series connection relation.
 12. A driving device of a vibration type actuator according to claim 11, wherein said drive control circuit includes: eight times pulse generating means which generates a pulse having a frequency eight times a target driving frequency; first pulse generating means which generates a pulse for setting a period during which eight pulses are generated to one period and setting a period during which three pulses are generated to a turning-on period on the basis of the pulse generated by said eight times pulse generating means, and sends the set pulse to said first switching element; and second pulse generating means which generates a pulse delayed by four pulses generated by said eight times pulse generating means from the pulse generated by said first pulse generating means, and sends the delayed pulse to said second switching element.
 13. A driving device of a vibration type actuator according to claim 12, wherein said drive control circuit further includes: third pulse generating means which generates a pulse delayed by two pulses generated by said eight times pulse generating means from the pulse generated by said first pulse generating means, and sends the delayed pulse to said fifth switching element; and fourth pulse generating means which generates a pulse delayed by two pulses generated by said eight times pulse generating means from the pulse generated by said second pulse generating means, and sends the delayed pulse to said sixth switching element.
 14. A driving device of a vibration type actuator according to claim 9, wherein said drive control circuit includes: an oscillator oscillates a reference frequency sufficiently higher than a driving frequency of the electro-mechanical energy conversion element; and synthesizing means which synthesizes a target pulse width of the switching pulse by dividing the reference frequency oscillated by said oscillator.
 15. A driving device of a vibration type actuator according to claim 9, wherein said drive control circuit includes: a pulse generator which generates a pulse of a reference frequency sufficiently higher than a driving frequency of the electro-mechanical energy conversion element; and synthesizing means which synthesizes a target pulse width of the switching pulse by counting the number of pulses generated by said pulse generator.
 16. A driving device of a vibration type actuator for obtaining a driving force by exciting an electro-mechanical energy conversion element by applying a periodic signal to the electro-mechanical energy conversion element, comprising: a D.C. power source; plural switching elements connected to said D.C. power source; an inductance element for voltage rise connected to said plural switching elements; and a drive control circuit which generates a switching pulse for operating said plural switching elements, wherein: said drive control circuit gradually increases a width of the generated switching pulse from zero at a rising time, operates said plural switching elements by the switching pulse so that the drive control circuit sweeps the pulse width until an amplitude ratio of a base wave frequency component to a total amplitude of higher harmonic wave frequency components of a voltage applied to said inductance element is approximately maximum, and fixes the pulse width in this state.
 17. A driving device of a vibration type actuator according to claim 16, wherein said plural switching elements includes: first and second switching elements each having one end connected to said D.C. power source and the other end connected to both ends of a first inductance element; third and fourth switching elements each having one end connected to the ground and the other end connected to both ends of said first inductance element; fifth and sixth switching elements each having one end connected to said D.C. power source and the other end connected to both ends of a second inductance element; and seventh and eighth switching elements each having one end connected to the ground and the other end connected to both ends of said second inductance element.
 18. A driving device of a vibration type actuator according to claim 17, wherein switching pulses given from said drive control circuit to said first and second switching elements have a phase difference of 180 degrees to each other and are set in a range of ±10% with an on-duty of 37.5% as a center at a stationary time; and switching pulses given from said drive control circuit to said third and fourth switching elements respectively have shapes obtained by inverting the switching pulses given to said first and second switching elements, and are set to have pulse widths each having a suitable delay time for preventing a through electric current from flowing through the switching elements in a series connection relation.
 19. A driving device of a vibration type actuator according to claim 17, wherein said drive control circuit includes: eight times pulse generating means which generates a pulse having a frequency eight times a target driving frequency; first pulse generating means which generates a pulse for setting a period during which eight pulses are generated to one period and setting a period during which three pulses are generated to a turning-on period on the basis of the pulse generated by said eight times pulse generating means, and sends the set pulse to said first switching element; and second pulse generating means which generates a pulse delayed by four pulses generated by said eight times pulse generating means from the pulse generated by said first pulse generating means, and sends the a delayed pulse to said second switching element.
 20. A driving device of a vibration type actuator according to claim 19, wherein said drive control circuit further includes: third pulse generating means which generates a pulse delayed by two pulses generated by said eight times pulse generating means from the pulse generated by said first pulse generating means, and sends the delayed pulse to said fifth switching element; and fourth pulse generating means which generates a pulse delayed by two pulses generated by said eight times pulse generating means from the pulse generated by said second pulse generating means, and sends the delayed pulse to said sixth switching element.
 21. A driving device of a vibration type actuator according to claim 16, wherein said drive control circuit includes: an oscillator which oscillates a reference frequency sufficiently higher than a driving frequency of the electro-mechanical energy conversion element; and synthesizing means which synthesizes a target pulse width of the switching pulse by dividing the reference frequency oscillated by said oscillator.
 22. A driving device of a vibration type actuator according to claim 16, wherein said drive control circuit includes: a pulse generator which generates a pulse of a reference frequency sufficiently higher than a driving frequency of the electro-mechanical energy conversion element; and synthesizing means which synthesizes a target pulse width of the switching pulse by counting the number of pulses generated by said pulse generator.
 23. A driving device of a vibration type actuator for obtaining a driving force by exciting an electro-mechanical energy conversion element by applying a periodic signal to the electro-mechanical energy conversion element, comprising: a D.C. power source; plural switching elements connected to said D.C. power source; and a drive control circuit which generates a switching pulse for operating said plural switching elements; wherein each of said plural switching elements is operated by the switching pulse generated by said drive control circuit, and said drive control circuit selects a width of the generated switching pulse so as to set the amplitude of a base wave frequency component among frequency components of a voltage applied to the electro-mechanical energy conversion element to be larger than a total amplitude of higher harmonic wave frequency components.
 24. A driving device of a vibration type actuator according to claim 23, wherein said plural switching elements includes: first and second switching elements each having one end connected to said D.C. power source and the other end connected to both ends of a first electro-mechanical energy conversion element; third and fourth switching elements each having one end connected to the ground and the other end connected to both ends of said first electro-mechanical energy conversion element; fifth and sixth switching elements each having one end connected to said D.C. power source and the other end connected to both ends of a second electro-mechanical energy conversion element; and seventh and eighth switching elements each having one end connected to the ground and the other end connected to both ends of said second electro-mechanical energy conversion element.
 25. A driving device of a vibration type actuator according to claim 24, wherein switching pulses given from said drive control circuit to said first and second switching elements have a phase difference of 180 degrees to each other and are set in a range of ±10% with an on-duty of 37.5% as a center at a stationary time; and switching pulses given from said drive control circuit to said third and fourth switching elements respectively have shapes obtained by inverting the switching pulses given to said first and second switching elements, and are set to have pulse widths each having a suitable delay time for preventing a through electric current from flowing through the switching elements in a series connection relation.
 26. A driving device of a vibration type actuator according to claim 24, wherein said drive control circuit includes: eight times pulse generating means which generates a pulse having a frequency eight times a target driving frequency; first pulse generating means which generates a pulse for setting a period during which eight pulses are generated to one period and setting a period during which three pulses are generated to a turning-on period on the basis of the pulse generated by said eight times pulse generating means, and sends the set pulse to said first switching element; and second pulse generating means which generates a pulse delayed by four pulses generated by said eight times pulse generating means from the pulse generated by said first pulse generating means, and sends the delayed pulse to said second switching element.
 27. A driving device of a vibration type actuator according to claim 26, wherein said drive control circuit further includes: third pulse generating means which generates a pulse delayed by two pulses generated by said eight times pulse generating means from the pulse generated by said first pulse generating means, and sends the delayed pulse to said fifth switching element; and fourth pulse generating means which generates a pulse delayed by two pulses generated by said eight times pulse generating means from the pulse generated by said second pulse generating means, and sends the delayed pulse to said sixth switching element.
 28. A driving device of a vibration type actuator according to claim 23, wherein said drive control circuit includes: an oscillator oscillates a reference frequency sufficiently higher than a driving frequency of the electro-mechanical energy conversion element; and synthesizing means which synthesizes a target pulse width of the switching pulse by dividing the reference frequency oscillated by said oscillator.
 29. A driving device of a vibration type actuator according to claim 23, wherein said drive control circuit includes: a pulse generator which generates a pulse of a reference frequency sufficiently higher than a driving frequency of the electro-mechanical energy conversion element; and synthesizing means which synthesizes a target pulse width of the switching pulse by counting the number of pulses generated by said pulse generator.
 30. A driving device of a vibration type actuator for obtaining a driving force by exciting an electro-mechanical energy conversion element by applying a periodic signal to the electro-mechanical energy conversion element, comprising: a D.C. power source; plural switching elements connected to said D.C. power source; and a drive control circuit which generates a switching pulse for operating said plural switching elements, wherein each of said plural switching elements is operated by the switching pulse generated by said drive control circuit, and said drive control circuit selects a width of the generated switching pulse so as to set an amplitude ratio of a base frequency component to a total amplitude of higher harmonic wave frequency components of a voltage applied to the electro-mechanical energy conversion element to be approximately maximum.
 31. A driving device of a vibration type actuator according to claim 30, wherein said plural switching elements includes: first and second switching elements each having one end connected to said D.C. power source and the other end connected to both ends of a first electro-mechanical energy conversion element; third and fourth switching elements each having one end connected to the ground and the other end connected to both ends of said first electro-mechanical energy conversion element; fifth and sixth switching elements each having one end connected to said D.C. power source and the other end connected to both ends of a second electro-mechanical energy conversion element; and seventh and eighth switching elements each having one end connected to the ground and the other end connected to both ends of said second electro-mechanical energy conversion element.
 32. A driving device of a vibration type actuator according to claim 31, wherein switching pulses given from said drive control circuit to said first and second switching elements have a phase difference of 180 degrees to each other and are set in a range of ±10% with an on-duty of 37.5% as a center at a stationary time; and switching pulses given from said drive control circuit to said third and fourth switching elements respectively have shapes obtained by inverting the switching pulses given to said first and second switching elements, and are set to have pulse widths each having a suitable delay time for preventing a through electric current from flowing through the switching elements in a series connection relation.
 33. A driving device of a vibration type actuator according to claim 31, wherein said drive control circuit includes: eight times pulse generating means which generates a pulse having a frequency eight times a target driving frequency; first pulse generating means which generates a pulse for setting a period during which eight pulses are generated to one period and setting a period during which three pulses are generated to a turning-on period on the basis of the pulse generated by said eight times pulse generating means, and sends the set pulse to said first switching element; and second pulse generating means which generates a pulse delayed by four pulses generated by said eight times pulse generating means from the pulse generated by said first pulse generating means, and sends the delayed pulse to said second switching element.
 34. A driving device of a vibration type actuator according to claim 33, wherein said drive control circuit further includes: third pulse generating means which generates a pulse delayed by two pulses generated by said eight times pulse generating means from the pulse generated by said first pulse generating means, and sends the delayed pulse to said fifth switching element; and fourth pulse generating means which generates a pulse delayed by two pulses generated by said eight times pulse generating means from the pulse generated by said second pulse generating means, and sends the delayed pulse to said sixth switching element.
 35. A driving device of a vibration type actuator according to claim 30, wherein said drive control circuit includes: an oscillator oscillates a reference frequency sufficiently higher than a driving frequency of the electro-mechanical energy conversion element; and synthesizing means which synthesizes a target pulse width of the switching pulse by dividing the reference frequency oscillated by said oscillator.
 36. A driving device of a vibration type actuator according to claim 30, wherein said drive control circuit includes: a pulse generator which generates a pulse of a reference frequency sufficiently higher than a driving frequency of the electro-mechanical energy conversion element; and synthesizing means which synthesizes a target pulse width of the switching pulse by counting the number of pulses generated by said pulse generator.
 37. A driving device of a vibration type actuator for obtaining a driving force by exciting an electro-mechanical energy conversion element by applying a periodic signal to the electro-mechanical energy conversion element, comprising: a D.C. power source; plural switching elements connected to said D.C. power source; and a drive control circuit which generates a switching pulse for operating said plural switching elements, wherein: said drive control circuit gradually increases a width of the generated switching pulse from zero at a rising time and operates said plural switching elements by the switching pulse so that the drive control circuit sweeps the pulse width until an amplitude ratio of a base wave frequency component to a total amplitude of higher harmonic wave frequency components of a voltage applied to the electro-mechanical energy conversion element is approximately maximum; and the drive control circuit fixes the pulse width in this state.
 38. A driving device of a vibration type actuator according to claim 37, wherein said plural switching elements includes: first and second switching elements each having one end connected to said D.C. power source and the other end connected to both ends of a first electro-mechanical energy conversion element; third and fourth switching elements each having one end connected to the ground and the other end connected to both ends of said first electro-mechanical energy conversion element; fifth and sixth switching elements each having one end connected to said D.C. power source and the other end connected to both ends of a second electro-mechanical energy conversion element; and seventh and eighth switching elements each having one end connected to the ground and the other end connected to both ends of said second electro-mechanical energy conversion element.
 39. A driving device of a vibration type actuator according to claim 38, wherein switching pulses given from said drive control circuit to said first and second switching elements have a phase difference of 180 degrees to each other and are set in a range of ±10% with an on-duty of 37.5% as a center at a stationary time; and switching pulses given from said drive control circuit to said third and fourth switching elements respectively have shapes obtained by inverting the switching pulses given to said first and second switching elements, and are set to have pulse widths each having a suitable delay time for preventing a through electric current from flowing through the switching elements in a series connection relation.
 40. A driving device of a vibration type actuator for obtaining a driving force by applying a periodic signal to an electro-mechanical energy conversion element portion arranged in a vibration member, comprising: a switching which is element switched in response to a pulse signal; an inductance element through which an electric current intermittently flows by switching said switching element; and setting means which applies a voltage generated by intermittently flowing the electric current through said inductance element to said electro-mechanical energy conversion element portion, and sets a duty of said pulse signal to a duty in which a base frequency component among frequency components of a voltage applied to said inductance element is larger than a higher harmonic wave component.
 41. A driving device of a vibration type actuator according to claim 40, wherein said inductance element is a primary coil of a transformer, and a driving voltage is applied to said electro-mechanical energy conversion element portion by the output of a secondary coil of the transformer.
 42. A driving device of a vibration type actuator according to claim 40, wherein said duty is a duty in a range of ±10% with 37.5% as a center.
 43. A driving device of a vibration type actuator according to claim 40, wherein said duty is a duty in which a ratio of the base frequency component to the higher harmonic wave component becomes approximately maximum. 